The WaferSense® Airborne Particle Sensor from CyberOptics Semiconductor was chosen as a finalist in The Best of the West 2011 Awards sponsored by Solid State Technology and SEMI at Semicon West in recognizing important product and technology developments in the microelectronics industries. Best of West finalists and award recipients were selected based on the submission's financial impact on the industry, engineering or scientific achievement, or societal impact and benefits, according to Semicon West.
About the Airborne Particle Sensor
The latest addition to CyberOptics' WaferSense family of semiconductor sensors, the Airborne Particle Sensor (APS) validates and analyzes wafer contamination in real time for wafer processing equipment used in the semiconductor market. It moves through semiconductor process equipment to monitor airborne particles, reporting information in real-time to allow engineers to efficiently validate wafer contamination.
Positioned to reduce and/or replace handheld and bench-top particle counters that are limited in range by hand reach and cannot operate under actual wafer conditions nor measure the entire wafer path, the APS can identify particles under actual varying wafer conditions in tool and report data in real-time to validate and analyze particle contamination. Available in 200 mm and 300 mm form factors, the APS can go deep inside a tool without the need for partitioning required by monitor wafers to isolate the source of the particle contamination.
For more information on the Airborne Particle Sensor, please refer to our web site at http://www.cyberopticssemi.com/products/wafersense/aps/
CyberOptics Airborne Particle Sensor Honored at Semicon West
