Hi all! Can anyone point me to somewhere I can get standards in cleanroom environment measurement? For example, in a cleanroom about 1000m^2, how many sample points are needed for temperature/RH, differential pressure, etc. Does this vary according to cleanroom class (class 10, 100, 100k?).
Are rules of thumbs existent, e.g. 1 sensor for every 10m^2?
I saw ISO 14644 has the title which seems to be closest to my needs, but am not sure if this is it (quite expensive to purchase without being sure). Of course, if anyone can point me to a free copy, much obliged :-)