RF Source for Inductively Coupled Plasma 13.56MHz

I am in the process of purchsing a 500 Watt Power Source along with a custom RF welding platform from SEBRA. I do not have a need for more power, therefore did not inquire about a larger unit. I would suggest calling their sales department, +1-520-881-6555 -or- +1-800-625-5550. By the way, they are in Tuscon AZ, in the Mountain Time Zone and do not observe Daylight Savings Time; they are ~12 hours behind you. If they do not have a 1kW off the shelf, they may be able to custom build one for you.

Good Luck.

I realize that for ICP-MS I require RF source with highly stable frequency as it is for plasma coupling and differs from normal RF heating where frequency can change considerably. For my application frequency is to be tunned and locked to plasma frequency.

The used semiconductor equipment market has lots of these 13.56MHz Rf generators.

Lam etcher RF supplies have the power you want. Other brands are also available. 13.56MHz was a standard in the semiconductor industry. The used market is full of them.

I have 5 that were donated to me that I unfortunately can't sell for two more years.

I will like to design one such compact device using IXYS MOSFETs.