If I pass the 5mm size reamer through 5mm drilled hole, what would be the final diameter of hole. Will it go more than 5mm and by how much amount (in micron)?
The hole would be bigger then 5mm, you want to leave about .5mm on the diameter for the reamer. Less than that will result in the reamer 'dancing' in the hole and it will cut oversize and most likely out of round. Surface finish would suffer as well.
Just a note, the reamer will follow the drill, it the hole need to to be straight, you should consider using a boring bar rather then a reamer.
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Be careful of what you wish for .....
Softer materials reamer will cut more. In Harder materials it will take less.
As others have posted, drill undersize leaving sufficent allowance for reamer to remove the coldworked as drilled layer.
Follow manufacturer guidleins for allowance based on hardness/ material.
This link should help:
skilledtradesmath.com/files/Reaming_Holes.ppt
milo
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