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Participant

Join Date: Dec 2010
Location: Seoul, Korea
Posts: 4

Used PVD sputtering Machine

12/20/2010 9:23 PM

I got a Germany made ( www.aurion.de) In line PVD sputtering machine. I'd like to sell this system. This system is ;

Ø In line Hi Vacuum PVD system

Ø Vertical type

Ø 7 Vacuum Chamber

Ø Continuous production system ( has loader return path on the rear side )

Ø Chamber size = H 850mm * L 1,350mm * W 350mm, Length : 13, 000mm ( has return path )

Ø Ultimate pressure : 3.0 x 10-6Torr bellow

Ø Pumping speed : 5.0 x 10-5Torr/5min below

Ø Turbo Pumper : Made in Germany - Hi speed vacuum Piffier

Ø Gas Flow Auto control system : Made in Germany – (Plasus )Sensing and control by automatic to make hi performance surface uniformity. And prevent the arcing.

Ø Coating material : TiO2,ITO,AL,Cr,SiO2,SnO

Ø Gas : O2, Ar, Nitride

Ø Cooling system : Cryo cooled polycold unit , Cooling traps for pumping unit

Control Unit : PLC, Touch Screen

Thanks !!

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Participant

Join Date: Mar 2011
Posts: 1
#1

Re: Used PVD sputtering Machine

03/03/2011 10:21 AM

Hello,

can you please provide the serial number and the type (MCD,MT..) ?

Where can the machine be inspected? Is a demonstration possible?

Thanks a lot.

Yours sincerely

Alex

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Participant

Join Date: Feb 2010
Posts: 1
#2
In reply to #1

Re: Used PVD sputtering Machine

07/12/2011 5:54 AM

Is this machine still available for sale???I am interested

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