I got a Germany made ( www.aurion.de) In line PVD sputtering machine. I'd like to sell this system. This system is ;
Ø In line Hi Vacuum PVD system
Ø Vertical type
Ø 7 Vacuum Chamber
Ø Continuous production system ( has loader return path on the rear side )
Ø Chamber size = H 850mm * L 1,350mm * W 350mm, Length : 13, 000mm ( has return path )
Ø Ultimate pressure : 3.0 x 10-6Torr bellow
Ø Pumping speed : 5.0 x 10-5Torr/5min below
Ø Turbo Pumper : Made in Germany - Hi speed vacuum Piffier
Ø Gas Flow Auto control system : Made in Germany – (Plasus )Sensing and control by automatic to make hi performance surface uniformity. And prevent the arcing.
Ø Coating material : TiO2,ITO,AL,Cr,SiO2,SnO
Ø Gas : O2, Ar, Nitride
Ø Cooling system : Cryo cooled polycold unit , Cooling traps for pumping unit
Control Unit : PLC, Touch Screen
Thanks !!
Plasma Coating
