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shmoi
Active Contributor

Join Date: Jul 2009
Location: Malaysia
Posts: 10

UV Light Output Measurement

03/09/2011 10:46 PM

Dear All, I have a UV vacuum Ionizer install in our machine, which act as a static discharge for the substrate in the sputtering chamber. As the unit do not come with the running hour timer, and I can not keep track of the usage of the UV bulb. The UV light output intensity reduce over time, in order to keep the maximum machine performance, I would like to look for a UV light metering equipment, appreciate if anyone can recommend me such measuring equipment. UV Wavelength range : 115 to 400 nm. Thanks Moi
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PeterT
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Join Date: May 2010
Location: Liverpool, NY
Posts: 961
Good Answers: 131
#1

Re: UV Light Output Measurement

03/10/2011 10:14 AM

Buy an elapsed time counter that you can connect to the power circuit for the light. A quick Google search should find you lots of alternatives. Then, whenever the light operates, the counter increments. Mount the timer in a convenient place for you to regularly check it, and when you approach the limit for the bulb you can make plans to change it. Problem solved.

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shmoi
Active Contributor

Join Date: Jul 2009
Location: Malaysia
Posts: 10
#2
In reply to #1

Re: UV Light Output Measurement

03/10/2011 6:56 PM

As I have more than 20 unit in the production floor, I do not prefer a timer to keep track of the lamp use, reason is, the timer is not house in the same housing as the UV lamp controller, it's possible the unit will be swap around and the timer value no longer valid.
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dvmdsc
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United States - Member - New Member

Join Date: Mar 2010
Location: In the pool because it is too hot.
Posts: 3054
Good Answers: 141
#3

Re: UV Light Output Measurement

03/10/2011 10:24 PM

I did UV measuring with LDR. Simple ohms measurement

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