Vacuum Oven

You can probably use any dry pump that will reach that pressure I would just place it several feet away and be prepared to put a fan on it. Varian has a very good pump bbut it's expensive and does have seals that wear out.

The only problem would be if you heated the oven to 105°C before pumping down or if you have a very high gas load. Remember that at 5 torr (.096 psi), there is not much air left in the chamber so unless you have a very high gas load from your process, the pump won't be moving much air/gas, so it won't get very hot from the gas it is pumping.

105°C is not a problem if throughput is not too high.

Viton seals will tolerate up to 150°C.

The air will be cooled down if pump and tubing is at lower temperature.

I have a small (0.3ft³) high vacuum oven (o,oo5mbar, 1000°C) which is directly pumped with a turbo-molecular pump. As there is almost no mass flow the temperature is never above 80°C, except if any of the seals of the oven is failing, this may be critical.

If you measure the gas throughput and ask the manufacturer of the scroll pump with these data you will get a good answer.

RHABE

Any dry pump will handle the 105°C temperature for the amount of time it takes to pull your small oven down to >5 Torr. The mass of air you air you are moving isn't enough to damage a pump - within a minute or so you will be moving such a small amount of air that it can't pose a threat to your pump. You can tell by measuring the temperature of the vacuum line going to the pump. The high temperature will only migrate a few inches down the vacuum line.

Yes it's true. For more information you can visit the site for Oven

www.knackwell.com