Polishing Machine for Thin Films

Hi kik0kik0,

I think the first site, the Society of Vacuum Coaters, would be pretty helpful. Are you a Member of that Society already, as it may be worth joining? It does seem to be very specific.

There is some detail of the general issues involved in the 'splutter process' on the second site. (It happens to be linked to our sponsors but this is purely coincidental, OK).

---------------------------------------------------------------------------------------------

Good luck! Get back to me if you need further help, but I think you will find what you require in the links on the two specific sites below.

These sites may help with advice specific to your requirements. Please check it out:

1. Society of Vacuum Coaters - SVC Education ProgramHis work has involved film growth by all forms of sputter deposition (MBE, CVD, MOCVD, ..... Methods for depositing thin films and for calculating performance .... It is intended for anyone using or planning to use plasma processing ..... of epitaxial films – in particular silicon, germanium, and gallium arsenide ...
   www.svc.org/Education/SVC-Education-Program.cfm - Cached - Similar -
2. Thin Film Equipment Information on GlobalSpecThin film equipment uses vacuum processing for the modification of surfaces ... then condensing or depositing the material onto the surface, substrate, wafer or part. ... Plasma ashing, plasma cleaning, sputter etching, sputter precleaning or ion ... aluminum, silicon, diamond like carbon (DLC), dopants, germanium, ...
   process-equipment.globalspec.com/.../Thin_Film.../Thin_Film_Equipment - Cached - Similar

Hi kik0kik0,

In addition to the first post I list below several sites which discuss the merits of the various methods used in vacuum coating.

I hope you find them useful.

I will help and advise as best I can whenever you leave a post.

Take care. And good reading!

---------------------------------------------------------------------------------------------

| Web History | Settings ▼| Sign outSearch settings Google account settings

Results include your SearchWiki notes for

Thin film deposit splutter polisher

. Share these notes

Copy and paste this link into an

email

or

IM

:

See a preview of the shared page

1. Polish on metals Polish on metalsgold deposit adhered badly and was easily rubbed off. Experiments were also performed ... investigators have been from very thin films. ... Gold films of various thicknesses were prepared by spluttering on to celluloid bases, ...
   www.jstor.org/stable/96973 -
   Show more results from www.iop.org
2. [PDF] The Foundations of Vacuum Coating TechnologyFile Format: PDF/Adobe Acrobat
   here to refer to both thin films and thick deposits ...... "A well-known instance of this is the 'spluttering' of the cathode in a vacuum tube; —") [130] would seem ...... polishing [345]. The cleaning technique was found ...
   www.svc.org/H/HISTORYA.PDF
   www.dcu.ie/mechanical_engineering/.../research_report.pdf
3. Full text of "The electric lamp industry"A thin film of lubricant is applied evenly to the plug, which is then inserted and ..... POLISHING not permissible in lamps of good quality, so that extreme care is ...... If iron oxide only was used, the arc would wander and splutter in ..... and hence when the lamp is extinguished a thin metallic deposit is ...
   www.archive.org/stream/.../electriclampindu00percuoft_djvu.txt

Hi,

if your substrate is Si then I would ask Logitech, Glasgow, Scotland

or Strasbaugh.

If not then first check the available patents to know who is active with your substrate.

In reality I would try to buy a good quality wafer - much cheaper than to produce yourself.

If you get these in class 100 clean room packaged under vacuum, open only inside your (evacuated) coater, then you will circumvent 100eds of problems that may arise by learning yourself.

Good deposition is a big task!

I wish you success!

RHABE

I think you should look into Chemical mechanical polishing (CMP) machines. Many manufacturers provide CMP machine for production as well as research. These machines will tend to be more sophisticated than a simple metallographic polisher.
You could also look for polishing equipment under the following GlobalSpec areas:

Buffing and Polishing Machines

Honing, Lapping and Superfinishing Machines

The machines you mentioned seem to be sample prep equipment, so another category to look into would be:
Microscopy and Metallography Sample Preparation Equipment