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Anonymous Poster

Metal Gauge Design on Rectangular Membrane

01/06/2008 1:55 AM

Dear Sir, This is Thangamani, doing research on sensor design. Ihave gone through Mr. Robert Dean (RF CMOS Designer, MEMS Optical,Inc) article that available on internet ( if not mistaken its fromMEMS forum) discussed analytical solution about rectangular membrane.Since i am doing research on sensor design, i am looking foranalytical solution for metal gauge on rectangular membrane. Most ofthe published articles had discussed only about circular membrane,gauge on circular membrane (W K Schomburg, et al., "The Design ofMetal Strain Gauges on Diaphragms" J.Micromech. Microeng. 14 (2004)page 1101 - 1108 ) and rectangular plates but i could not find anypublication on "analytical solution for metal gauge on rectangularmembrane". Hence could you help me to provide more information aboutthis issue. Also i have few questions in my mind which i couldn't getanswer,

1. How the industry / researcher optimized design of gauge onrectangular membrane before FEA tool introduced?

2. How the industry / researcher calculated the active region onrectangular membrane (substrate) to design gauge (grid) pattern beforeFEA (FEM) Tool (like ANSYS) introduced.

3. How the industry / researcher designed gauge (grid) pattern onrectangular membrane 2 or 3 decades ago without a theoreticalexplanation (analytical solution)?

4. Since metal foil strain gauges (rectangular strain gauge) stilldominates due to many features, why could not find a theoreticalstudy (analytical solution) on internet.

Could you please provide answer to my query. This is my humble request.I apologize for taking your time to answer these questions.

Yours Truly

Thangamani Uthirapathi

Centre for Artificial Intelligence
School of Eng & IT
Universiti Malaysia Sabah
Kota Kinabalu, Sabah
MALAYSIA - 88999

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#1

Re: Metal Gauge Design on Rectangular Membrane

01/07/2008 2:51 AM

Hi Thangamani,

1. rectangular membranes could be calculated more than 100 years ago, see for example the books of Timoshenko (classical elasto-mechanics).

2. nobody would like to use rectangular membranes for measurement. This makes sense only with the limited production possibilities of microtechnology, any conventional sensor is naturally a circular one.

3. see 1. there is a theoretical solution and there is something much better: introducing thickness variations to optimise strength. If done good you will get a constant stress distribution without any variations and without stress concentrations. This will give much better load to deflection ratio thus much better dynamic rabge at given material properties.

4. Solutions are much older than the internet, search for books.

Anything has many optimum solutions that depend on the possibilities you have to realisation.

Good sensors have no sharp transitions between membranes and sensor-body!

RHABE

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